Abstract
Electron-beam shaping opens up novel imaging possibilities in electron microscopy (EM). The implementation of a phase or amplitude mask in the condenser lens system allows the generation of electron beams with various shapes. Non-diffractive Bessel beams (BBs) are of interest for numerous applications due to their extraordinary large depth of focus. We present an experimental demonstration of single high-intensity quasi non-diffractive electron BBs generated by direct phase masks (PMs). The PM fabrication by focused ion beam is optimized using custom scan routines. The propagation of the electron beam after transmission through several PMs is analyzed in detail. A sub nm-sized non-diffractive electron beam is realized in the object plane of a transmission electron microscope. The experiments agree well with simulations and a route towards a beneficial application of non-diffractive electron beams in EM is discussed.
Highlights
15 March 2019Electron-beam shaping opens up novel imaging possibilities in electron microscopy (EM)
Shaping the electron beam for novel applications in scanning transmission electron microscopy (STEM) has attracted tremendous interest since the first experimental observation of an electron vortex beam, i.e. a beam carrying orbital angular momentum [1]
We optimized the fabrication process of direct phase masks (PMs) by applying a lift-off process to create Pt apertures and custom circular scan routines for focused ion beam (FIB) milling of the necessary thickness profile. This leads to an enhanced homogeneity of the PM and to an improved quality of the generated electron beams
Summary
Electron-beam shaping opens up novel imaging possibilities in electron microscopy (EM). The. Any further distribution of this work must maintain implementation of a phase or amplitude mask in the condenser lens system allows the generation of attribution to the electron beams with various shapes. Non-diffractive Bessel beams (BBs) are of interest for numerous author(s) and the title of the work, journal citation applications due to their extraordinary large depth of focus. Demonstration of single high-intensity quasi non-diffractive electron BBs generated by direct phase masks (PMs). The propagation of the electron beam after transmission through several PMs is analyzed in detail. A sub nm-sized non-diffractive electron beam is realized in the object plane of a transmission electron microscope. The experiments agree well with simulations and a route towards a beneficial application of non-diffractive electron beams in EM is discussed
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