Abstract
A quantitative method for the direct determination of defocus Δf, local sample thickness t and local composition x from high-resolution transmission electron microscopy (HRTEM) lattice images of wedge-shaped samples is described. The method is applicable to a wide class of crystalline materials comprising elemental semiconductors, elemental metals and substitutional random alloys composed of these elements. The proposed method relies on the functional dependence of linear and non-linear image Fourier coefficients on the parameters defocus Δf, sample thickness t and composition x. This relationship is analytically derived by application of the Bloch wave formalism and the non-linear imaging theory to the HRTEM imaging process. Influences of inelastic electron scattering and partially coherent illumination conditions are taken into account explicitly.
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