Abstract
Abstract We have investigated the static and dynamic behavior of piezoelectric (PZT) actuated SiO2/Si membranes with an off-centered PZT patch. Three-dimensional wide-field interferometer has been used to achieve measurement of membrane topography and bending. It is demonstrated that the piezoelectric coefficient d31 can be extracted directly from these three-dimensional static deformation measurements. We have also shown that polarization voltage of an off-centered PZT patch influences in a different manner the resonant frequency shift of the first and the second vibration modes. Degenerated modes can be also discriminated thanks to the positioning of the PZT patch.
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