Abstract
Abstract Very thin films of lead zirconate titanate (PZT) (40/60), 0.26 μ or less, have been prepared on Pt-coated oxidized Si substrates (Pt/Ti/SiO2Si) by a sol-gel process. These films were of high density with fine grains of about 0.2 μm and annealed in the range of 600° to 700°C in oxygen atmosphere. X-ray diffraction patterns taken on this film showed single-phase perovskite-type structure. Pyroelectric and P-E hysteresis curve measurements, as well as measurements of the dielectric constant and loss tangent versus temperature and frequency, were performed. The influence of poling treatment on the dielectric and pyroelectric properties was also investigated, as well as dielectric constants and pyroelectric properties. Dielectric constants and pyroelectric coefficients at room temperature were determined as 1300 and 840, and 68.0 and 10.3 nC/cm2. °C for the poled and unpoled PZT films, respectively. The remanent polarization was 37.8 μC/cm2, and a coercive field was 146 kV/cm at a switching voltage of...
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