Abstract
The paper reviews the main types of pulsed self-sustained discharges produced in gas by strong microwaves. The paper lists base types of microwave generators used to produce pulsed discharges and classifies the discharges relative to their base parameters: the way the discharge gets localized in a limited space, amplitude and frequency of the microwave field, gas pressure and composition, duration of microwave pulses. The paper analyses potentials of pulsed microwave discharges for manufacture of diamond films, ozone generation and pumping of nitrogen and excimer lasers.
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