Abstract
In electrochemical micro-machining technology using ultra-short pulses, the machining accuracy is limited by pulse width of the power supply. Here, a mathematical model for tuning pulse width in electrochemical micro machining by means of differential circuits was proposed. Using this model, the step responses of the system under different time constants were simulated, which showed that the pulse width of the step response becomes quite short when the time constant of the differential circuit is short enough. Based on the model, an electrochemical micro-machining system was produced. Using this system, some micro-structures were successfully produced. The machining accuracy reaches the nanometer scale. This illustrates our model for tuning pulse width in electrochemical micro machining.
Highlights
Electrochemical theory is used widely in chemical power, sensors, biological signal analysis and micro machining [1]–[5]
CONTROL EQUATION AND PULSE WIDTH TUNING BASED ON ONE DIFFERENTIAL CIRCUIT On the basis of the existing rectangular pulse electrochemical micromachining (ECM) circuit, a differential circuit is introduced, and the conventional rectangular pulse signal is transformed into a tip pulse signal, which is more suitable for ECM
The present study proposed a mathematical model for tuning pulse width of the voltage signals by means of the differential circuits in electrochemical micro machining
Summary
Electrochemical theory is used widely in chemical power, sensors, biological signal analysis and micro machining [1]–[5]. R. Schuster used an equivalent circuit model to describe the coupled electronic and ion circuit for the electrochemical micromachining and proposed electrochemical micromachining (ECM) technique using ultra short pulses [17]. The precision of micro-ECM can be greatly improved by using ultra-short pulse signals, the machining accuracy is limited by the pulse power supply. The ultra-short pulse signals are generated by ordinary step signals plus a differential circuit, so there is no special requirement for expensive power supply. This illustrates our mathematical model for tuning pulse width in electrochemical micro machining
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