Abstract
A comparative investigation of virgin and proton exchanged X-cut samples of LiNbO3 is performed by X-ray photoelectron spectroscopy, infrared absorption spectroscopy and optical waveguide measurements. The thickness and composition of subsurface protonated layers are estimated from the intensities of Li 1s, O 1s and Nb 3d peaks and independent optical measurements. The thickness of a layer subjected to Ar− ion sputtering is estimated to be 0.5 μm whereas the thickness of the entire protonated layer is measured to be 2.4 μm An unexpected high Li content is established at the very surface of the protonated sample.
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