Abstract
Films of titanium solid solutions Ti-X x (X = C, N, or O) of the hexagonal phase were prepared on glass substrates heated at 350°C in a mixture of argon and the reactive gas with controlled partial pressures from 2×10 −6 to 8×10 −3 Torr. The maximum solubilities of C, N, and O in Ti were estimated to be 0.05, 0.46, and 0.28, respectively. The observed values of the maximum solubilities are discussed in connection with the structural and electrical properties.
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