Abstract
Sb2Se3 alloy is used as a dopant for Ti–Sb–Te phase change material aiming to improve the thermal stability of Ti–Sb–Te based phase change memory cell. In this paper, the thermal and electrical properties of Sb2Se3-doped Ti0.32Sb2Te3 are respectively investigated. Compared with Ti0.32Sb2Te3 material, (Sb2Se3)0.28(Ti0.32Sb2Te3)0.72 has better thermal stability with crystallization temperature of 203 °C and estimated 10-year data retention of 102 °C. For the (Sb2Se3)0.28(Ti0.32Sb2Te3)0.72-based PCM cell, it inherits the advantage of fast switching speed and good endurance of TST based one with wider SET/RESET window. The effects of Sb2Se3 doping on the structure of Ti0.32Sb2Te3 are also systemically studied. In crystalline (Sb2Se3)0.28(Ti0.32Sb2Te3)0.72 film structure, Se is prone to substitute Te and bond with Sb and Te in the Sb2Te3 lattice structure which may decrease the crystal lattice constant.
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