Abstract

In this work, we review several experimental results showing the electrical properties of barium cerate-zirconate thin films and discuss them in view of the possible influence of various factors on their properties. Most of the presented Ba(Ce, Zr, Y)O3 thin films were formed by the pulsed laser deposition (PLD) technique, however thin films prepared using other methods, like RF magnetron sputtering, electron-beam deposition, powder aerosol deposition (PAD), atomic layer deposition (ALD) and spray deposition are also reported. The electrical properties of the thin films strongly depend on the film microstructure. The influence of the interface layers, space-charge layers, and strain-modified layers on the total conductivity is also essential but in many cases is weaker.

Highlights

  • The first inorganic thin films were produced in Egypt around 3000BC [1]

  • What should be remembered while a device composed of at least one thin layer deposited on a substrate is considered is that the film may be strained as a result of structural differences between the substrate and the thin film

  • The authors correlated the activation energy of proton conduction with strain, that is, the Ea decreased with the increase in lattice constant. This observation is in agreement with the work published by Fluri et al [25] concerning the strained films of BZY20 deposited on MgO, these results showed that the influence of strain on proton conduction is more complex

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Summary

Introduction

The first inorganic thin films were produced in Egypt around 3000BC [1]. Egyptians produced gold films for decorative applications with a thickness of roughly a few microns. To obtain the desired properties of a certain material or a device, one has to select an adequate technique and control the physical process of the thin film deposition. What should be remembered while a device composed of at least one thin layer deposited on a substrate is considered is that the film may be strained as a result of structural differences between the substrate and the thin film. It is important since many film properties have been found to depend on strain.

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