Abstract
Recombination of slow highly charged ions at the surface of a target foil can be used as a source of x rays for a projection x-ray microscope. In a first test of this concept, a low emittance beam of Ar18+ and Ar17+ ions from an electron beam ion trap was focused with einzel lenses to a 20 μm full width at half maximum spot on a beryllium target foil. The 3 keV x rays from radiative deexcitation of the ions were used to obtain a magnified image of an electroformed nickel mesh with 20 μm resolution by projection onto a CCD camera. Prospects for substantial improvements in resolution and intensity are discussed.
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