Abstract
In this paper new high vacuum components such as metal seals and chain clamps are described. In vacuum technology, metal seals are widely used to achieve a high vacuum with reduced contamination. A metal sealed connection is radiation resistant, and can be baked out or used at cryogenic temperatures. In order to save assembly time in places with limited access, chain clamps have been used to build quick release flange couplings also for standard conflat flanges with copper gaskets. A modified CF compatible gasket, produced in three different materials (aluminium, copper and nickel) is introduced which reduces the required sealing force. An improved metal sealed chain clamp connection suitable for the temperature range of −273 up to +400 °C and a metal sealed quick coupling between standard CF/ISO flanges and tapered flanges using chain clamps are described. Advances in manufacturing metal seals allow the production of knife edge seals according to any customer profile. RF and high vacuum sealing are achieved with one metal seal.
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