Abstract
We studied the characteristics of two different types of planar cylindrical microwave launchers installed inside the vacuum chamber for the production of a large-area processing plasma. The microwave launcher consisted of a coaxial waveguide and a cylindrical planar cavity, inside which a large-area thin quartz plate was inserted. We tested two configurations of microwave launchers; one was a closed cylindrical cavity structure and the other was a leaky open cavity structure. With a 1.5 kW microwave source, we demonstrated the production of large-area, surface-wave plasma (SWP) using Ar gas. Using the microwave launcher with a leaky open cavity structure, a spatial uniformity of SWP within ±3.5% over 160 mm in radius was achieved at a pressure of 20 ∼ 30 Pa. Numerical analyses using the electromagnetic wave simulator, MAFIA, were also carried out to study the electric field distribution radiated from the microwave launcher and to explain the experimental results.
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