Abstract
We have developed a method to produce a nm sized slow highly-charged ion beam based on a self-organized charge up inside a single tapered-glass capillary. In order to investigate the characteristics of the obtained beams, the transmission of 8 keV Ar8+ beam through the capillary of 5-cm long with 800/24 μm inlet/outlet inner diameter was examined. The transmitted beam had the same size as the outlet with the beam-density enhancement of approximately 10. The initial beam was guided through a capillary tilted by as large as ±100 mrad and it still kept the incident charge. A focused ion beam of Ga+ was employed to manufacture the capillary outlet as small as several hundreds nm in diameter and fabricate a thin glass window at the capillary outlet for biological applications.
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