Abstract
ABSTRACTCopolymers of vinylidene fluoride and trifluoroethylene (P(VDF-TrFE)) have been used in a variety of devices such as transducers, actuators and sensors because of their good electroactive properties. Our earlier work showed that the electric field-induced strain in P(VDF-TrFE) copolymers can be enhanced significantly after high energy proton irradiation. In this study, micromachined actuators using proton-irradiated P(VDF-TrFE) copolymer as the active element have been fabricated. P(VDF-TrFE) 70/30 mol% copolymer film with a thickness of ∼ 3.3 μ m was spin-coated on a silicon (Si) substrate. After etching the Si substrate by bulk micromachining, an actuator in the form of a suspended membrane was obtained. High energy proton irradiation with a dose of 107 Mrad was carried out to modify the properties of the copolymer film. The resonance characteristics of the actuators based on these irradiated copolymer films were studied and the displacement induced in the actuators was measured using a laser vibrometer. These types of polymer-based micromechanical systems have the advantages of being lightweight and have high toughness, thereby reducing the risk of breakage. By applying different d.c. bias voltages, the magnitude of the displacement induced in the actuator can be varied.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
