Abstract

A current–voltage characteristic of one-side planar and cylindrical probes was considered for the use in the determination of plasma parameters when the electron velocity distribution functions (EVDFs) were significantly anisotropic. The EVDFs, space potential, and rates of inelastic process in pulse modulated and stratified discharges were obtained. The results obtained using the exact and simplified method were compared. It was also shown that only a simplified method gives satisfactory results in the wide range of discharge conditions. Some discrepancies between theoretically determined and measured potentials in homogeneous plasma were found. A procedure, which allows for exact determination of space potentials, was given.

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