Abstract
The influence of the rf-plasma potential oscillations in the planar system with a small ratio of the area of the powered electrode to the area of the grounded surfaces has been investigated. Although no effect of the blocking rf filters in the probe circuit on the probe measurements has been found, the ac connection of an auxiliary electrode having a large surface to the measuring probe have caused a considerable shift of the probe characteristic. The rf-plasma potential oscillations can, therefore, distort the probe measurements and their influence must be taken into account. A new method is proposed that allows to estimate the error caused by these oscillations.
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