Abstract
A full wave or lambda resonator (λ-R) is a capacitively balanced radio-frequency (rf) inductive plasma source. It has three separate inductive excitation zones with opposite magnetic momenta strictly located at their axial positions. The 2 kW, 27 MHz, 1.4 Torr pressure discharge in oxygen was studied by means of movable single rf compensated fine cylindrical Langmuir probes. Flat wall probes were also used to reveal the distribution of positive ion flux and floating potentials on the chamber wall. The electron density in the λ-R discharge varies from 107–108 cm−3 at 5–10 mm distance from the wafer to 2×1011 cm−3 in the central plasma toroid. One of the main problems of the probe operation is high gas temperature of ∼1500 K in the plasma toroid and high-power dissipation on the probe surface. That is why not only fine cylindrical but also 100–130 μm diam spherical probes were used. The probe technique and preliminary results are presented.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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