Abstract
Suspended single-walled carbon nanotubes (SWCNTs) offer unique functionalities for electronic and electromechanical systems. Due to their outstanding flexible nature, suspended SWCNT architectures have great potential for integration into flexible electronic systems. However, current techniques for integrating SWCNT architectures with flexible substrates are largely absent, especially in a manner that is both scalable and well controlled. Here, we present a new nanostructured transfer paradigm to print scalable and well-defined suspended nano/microscale SWCNT networks on 3D patterned flexible substrates with micro- to nanoscale precision. The underlying printing/transfer mechanism, as well as the mechanical, electromechanical, and mechanical resonance properties of the suspended SWCNTs are characterized, including identifying metrics relevant for reliable and sensitive device structures. Our approach represents a fast, scalable and general method for building suspended nano/micro SWCNT architectures suitable for flexible sensing and actuation systems.
Highlights
The electrophoretic and backside etching methods that evolved from conventional micro-electro-mechanical system (MEMS) and nano-electro-mechanical system (NEMS) technology are more compatible with current industrial processes and have relatively good controllability in size and position[16,29]
single-walled carbon nanotubes (SWCNTs) network films are patterned on a SiO2 (100 nm)/Si substrate using a template guided fluidic assembly process[40,41,42,43,44], where the SiO2 layer acts as a sacrificial release layer
The residual HF acid solution is removed by tilting the superhydrophobic substrate, leaving the SWCNT networks suspended between nano/ micro patterns of polymers
Summary
The electrophoretic and backside etching methods that evolved from conventional micro-electro-mechanical system (MEMS) and nano-electro-mechanical system (NEMS) technology are more compatible with current industrial processes and have relatively good controllability in size and position[16,29]. By combining a micro-patterned, Lotus leaf-like substrate with a wet-contact printing transfer technique, almost 100% of SWCNT networks could be suspended without collapsing from capillary forces This transfer approach is highly effective in “printing” nano/microscale SWCNT suspended networks on patterned superhydrophobic polymer surfaces that can be used for 3D flexible electronic devices including NEMS and MEMS applications. This entire transfer technique could be conducted under a one-step, CMOS compatible process, suitable for Roll-to-Roll manufacturing
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