Abstract

A signal mass piezoelectric six-degrees-of-freedom (six-DOF) accelerometer is put forward in response to the need for health monitoring of the dynamic vibration characteristics of high grade digitally controlled machine tools. The operating principle of the piezoelectric six-degrees-of-freedom accelerometer is analyzed, and its structure model is constructed. The numerical simulation model (finite element model) of the six axis accelerometer is established. Piezoelectric quartz is chosen for the acceleration sensing element and conversion element, and its static sensitivity, static coupling interference and dynamic natural frequency, dynamic cross coupling are analyzed by ANSYS software. Research results show that the piezoelectric six-DOF accelerometer has advantages of simple and rational structure, correct sensing principle and mathematic model, good linearity, high rigidity, and theoretical natural frequency is more than 25 kHz, no nonlinear cross coupling and no complex decoupling work.

Highlights

  • Many motion controlled and measured systems, such as vehicles, automatic navigation, earthquake prediction devices, robot control systems, health monitoring of machine tools and other areas requireSensors 2013, 13 determination of spatial vibration characteristics

  • Six-DOF acceleration sensing methods can be classified into the single-mass-spring-damper six-axis acceleration sensing approach (SPMSD approach) and the integrated six-axis acceleration sensing approach based on multiple single-axis accelerometers (MSAAs approach) [1]

  • The cross coupling interferences of the piezoelectric six-axis accelerometer only take place in ay, amx, ax, amy directions, and these interferences are the linear coupling interferences, which are different from traditional nonlinear coupling and can be eliminated using a mathematical compensation method, and these results were consistent with the results based on the structural model of the six-axis accelerometer

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Summary

Introduction

Many motion controlled and measured systems, such as vehicles, automatic navigation, earthquake prediction devices, robot control systems, health monitoring of machine tools and other areas require. According to the type of conversion element used, the six-axis accelerometers based on the SPMSD approach can be classified into elastic style [2], electrically suspension style [3], superconducting suspension style [4], spring photoelectric style and so on [5] These sensors have advantages of compact conformation and high degree of integration, they have the disadvantages of complicated production process, high cost, narrow scope of application, difficult miniaturization and so on, due to the fact the SPMSD approach is similar to the research idea of elastic style six-axis force/torque sensors, there are two bottleneck contradictions, including the degree of complexity of the structures and the difficulty of decoupling, high stiffness and high sensitivity [6]. The research results show that the measurement principle of the piezoelectric six-DOF accelerometer is correct

Measurement Principle and Structure Model
Measurement Principle
Structure Model
Experiment of Numerical Simulation
FEM Model
Static Characteristics Simulation Analysis
2.40 E 04
Dynamic Characteristics Simulation Analysis
Simulation Analysis of Combined Loading
Conclusions
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