Abstract
AbstractThis paper describes a micromachined pressure sensor that senses pressure not by a diaphragm structure but by a resonantly vibrating comb‐drive actuator. The electrical admittance of the comb‐drive actuator was directly measured using a lock‐in amplifier, and its pressure dependence was examined. From the experiment, it was found that the resonant frequency of the comb‐drive actuator gradually drops as the pressure increases. The sensitivity of the comb‐drive actuator as a pressure sensor was 0.34 Hz/MPa at atmospheric pressure and 0.1 Hz/MPa at 0.4 MPa absolute pressure. Copyright © 2007 Institute of Electrical Engineers of Japan© 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.
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