Abstract
A microfabrication method to produce YBa2Cu3O7-δ (YBCO) was investigated using the metal organic deposition (MOD) process with electron beam (EB) irradiation. EB irradiation causes decomposition of the C–H and –COO– bonds and desorption of oxygen atoms in the metal octylate precursors. Therefore, oxidation of metal atoms could become harder for the MOD with EB irradiation than for the conventional MOD because of lack of oxygen, and consequently a longer prefiring time is required to ensure oxidation of the metal atoms. Additionally, the heating rate for crystallization was increased to improve film coverage. Finally YBCO film with superconductivity was successfully obtained.
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