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Abstract
A new method of producing trichlorosilane by hydrogenation of silicon tetrachloride with assistance of DC charged thermo-plasma was proposed. We have studied the dependence of degree of disassociation and ionization of hydrogen on temperature, as well as the function of heat capacity, via which the optimal volume and H2: SiCl4 molar ratio were confirmed. A DC power of 50 kW was equipped and the highest yield of trichlorosilane was above 70%, with an average yield about 60% and minimum unit energy expenditure about 3.2 kWh/kg for SiHCl3. This process is possible to be industrialized.
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