Abstract
Thin films of LiCoO 2 prepared by the electron cyclotron resonance (ECR) sputtering method are investigated under various deposition conditions. Well-crystallized LiCoO 2 films were obtained without a post-annealing process in a high microwave and RF power range with a low O 2 to Ar ratio. All-solid-state thin-film lithium batteries using the LiCoO 2 films (thickness: 6.2 μm) provided a discharge capacity of about 250 μAh cm −2 with good cyclability.
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