Abstract
In this study, preparation of photosensitive indium niobate (InNbO4) gel films by using a chemical modification reagent and their characteristics were investigated. In the electronic absorption spectra of the InNbO4 gel films, the absorption peak assigned a chelate ring was observed at 340 nm, this peak intensity decreased by UV irradiation. From this result, the obtained gel films exhibit photosensitivity. About 10 μm patterns could be fabricated. The InNbO4 film heat-treated at 600–900 °C exhibited diffraction peaks of monoclinic crystals and the photoinduced hydrophillic properties.
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