Abstract
Thin films of Bi 2Sr 2CaCu 2O 8+δ with T c up to 92 K were prepared by an in situ sputtering method on SrTiO 3 (100) and LaAlO 3 (100) substrates. A strong c-axis orientation of the film growth with low mosaic spread and full epitaxy within the ab-plane were confirmed by X-ray diffraction in Bragg-Brentano and four-circle geometry. Rutherford backscattering and channeling confirm the correct film composition and highly textured growth with a minimum yield of 23%. The surface morphology of the films was examined by STM and SEM studies, revealing a low density of precipitates and the absence of screw dislocations. The depth profile of the composition was investigated by secondary neutrals mass spectroscopy (SNMS).
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