Abstract
Room temperature methane (CH4) response characteristics of vanadium oxide (VOx) thin films loaded with platinum (Pt) nanoparticles were investigated for detection of CH4. The Pt/VOx thin films have been prepared on sapphire substrate by means of dc-magnetron sputtering of V metal, followed by deposition of Pt nanoparticles, and then rapid thermal annealing (RTA) in O2 atmosphere from 450°C to 470°C. SEM and XRD were used to investigate the morphology and crystal structure of the films. The results showed that irregular rod-shaped particles with size on the average of 100 nanometers and the monoclinic vanadium dioxide (VO2) were obtained. The property of metal to insulator transition (MIT) was a confirmation of the prepared VO2. The sensor annealed at 460°C showed the largest response value which was 18.2 toward methane (CH4) at room temperature with the concentration of 500ppm. The optimal operating concentration for CH4 detection is 1500ppm.
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