Abstract
A reactive rf-sputtering method is used for depositing polycrystalline (NiZn)Fe2O4 films. The relations between the magnetic properties of the ferrite films and the sputtering conditions are examined in detail. The best condition of rf-sputtering, under which the magnetization of the films as well as the bulks is obtained and the initial relative permeabilities amount to 50∼100 even in the frequency region over the Snoek's limit, is found. Finally, the way to improve the preparation of the films is discussed.
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