Abstract
Cr–N–O, Cr–Zn–N–O, and Zn–O thin films were prepared by pulsed laser deposition. The compositional analysis of the Cr–Zn–N–O thin films by Rutherford backscattering spectroscopy revealed that they are ternary compounds of the Cr–Zn–N–O system. Their Vickers hardness was about 4200 kgf/mm2. X-ray diffraction indicated that the Cr–N–O and Cr–Zn–N–O thin films have the NaCl-type structure (B1), the same as CrN. Transition electron microscopy observation indicated that a grain of the (Cr,Zn)(N,O) phase existed, on the basis of which it could be considered as a solid solution of B1-CrN and a high-pressure phase of ZnO with the B1 structure.
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