Abstract
This paper describes methods and evaluation results of predicting the number of defects in image sensors using equipment QC data. Virtual metrology (VM) models are mainly used for measurable values such as dimensions and electrical characteristics. Herein, to predict countable values, we used a regression tree and stepwise AIC for variable selection as well as the “hockey-stick regression model” and generalized linear model for regression, instead of the partial least squares (PLS) regression. The results showed an improved prediction performance in comparison with the conventional method. This method can be used to predict other countable values such as defects or dust particles.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
