Abstract

A novel type of nonlinear robust control strategy is proposed in view of uncertain nonlinear factors, such as hysteresis, creep, and high-frequency vibration, of piezoelectric actuators (PEAs). This strategy can be used for the precise trajectory tracking of PEAs. The Bouc–Wen dynamic model is reasonably simplified to facilitate engineering application. The hysteresis term is summarized as an unknown term to avoid its nonlinear parameter identification. The controller robustness is achieved due to the nonsingular terminal sliding mode control, and the online estimation of unknown disturbances is realized because of the delay estimation technology; thus, no prior knowledge of the unknown boundary of the system is required. The precision robust differentiator is used to estimate the speed and acceleration signals in real time on the basis of the obtained displacement signals. The closed-loop stability of the system is proved by the Lyapunov criterion. Experimental results show that the proposed control strategy performs better than the traditional time-delay estimation control in terms of control accuracy and energy conservation. Therefore, the proposed control strategy can play an important role in the micro/nanofield driven by PEAs.

Highlights

  • In recent years, the high-precision micro/nano-operation technology has played an increasingly important role in modern industrial systems [1]

  • This study aims to explore a sliding-mode controller that can be implemented by a computer, has a simple structure, and nonsingular

  • We propose a high-precision robust controller that combines the nonsingular TSM (NTSM), time-delay estimation (TDE), and robust exact differentiator (RED) technologies to overcome the uncertain nonlinear factors, such as hysteresis, creep, and high-frequency vibration, that are common in trajectory tracking of Piezoelectric actuators (PEAs)

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Summary

Introduction

The high-precision micro/nano-operation technology has played an increasingly important role in modern industrial systems [1]. Appropriate control strategies for motion control are necessary to overcome the displacement error produced by uncertain nonlinear factors and achieve fast response of PEAs and high-precision trajectory tracking. A robust controller can be constructed on the basis of the feedforward, feedback, or composite control [9]. The dynamic model of PEAs is nonlinear with a complex structure and numerous parameters. Feedforward or complicated control is not conducive to engineering applications. Precise trajectory tracking is achieved, and PEAs will have high engineering applicability in micro/nanooperations

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