Power Module Package Structure Capable of Surviving Greater ΔTj Thermal Cycles

Abstract

A new SiC power module package structure is proposed that is capable of withstanding greater ΔTj cycle stress. Its most notable feature is the use of a SiN substrate having Cu/Invar/Cu foils (C/I/C thickness ratio of 1/8/1) brazed on both sides as conductor plates. The CIC foils show a very low coefficient of thermal expansion (CTE) of 5.1 ppm/°C and therefore can significantly reduce package degradation resulting from the larger CTE mismatch of the conductor to SiC and SiN. A thermal cycle test (TCT) was conducted between -40°C and 250°C (ΔTj = 290°C). It was found that the SiC/Au-Ge/CIC-SiN die attachment maintained joint strength of 78 MPa even after 3000 cycles.