Abstract
The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for brittle materials such as glass. silicon and ceramics. capable ofbr/ producing micro stmctures larger than lOO㎛. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problcms in the precision machining results from wear of mask film. Therefore. well-controlled masking process is the most important factor for micro machining of glass with accuracy.
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