Abstract
This paper describes the application of multiple beam shearing interferometry to a position magnifying sensor. A multiple beam shearing interferometer (MBSI) with a shear plate wedged in the vertical direction produces sharp multiple beam fringes. When the lateral displacement of a point source (which gives rise to the input beam of the MBSI) or its image occurs in the horizontal direction, these fringes move vertically in a magnified manner. This characteristic was used in a position magnifying sensor to detect the displacement of a point image. The advantages of the sensor include a large displacement magnification (more than a hundred times) and a large working distance.
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