Abstract

The cantilever is prone to produce position error under external disturbance, however, the position error has no feedback, this limits the positioning speed and precision of the cantilever. Based on distributed parameter method, the paper first built a cantilever dynamic model that can accurately describe the elastic deformation characteristics of the end of cantilever, and in accordance with the positioning requirements of the end of cantilever, the model is simplified to the first two modes. Then based on the simplified model, and combines with a Stewart platform which has characteristics of quick response and high positioning accuracy, a position error compensation system is built. This position error compensation system can realize high accuracy positioning of the working point of the Stewart platform. The veracity of the model and the validity of the method are verified by the experiment, the result shows that the relative error of positioning accuracy between Stewart platform's working points is 3.1%, and positioning accuracy can achieve to 10 um. So, the correctness of the 2-order dynamic model and the effectiveness of long cantilever position error compensation system are verified.

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