Abstract
The organic/inorganic hybrid particles with polymethylmethacrylate (PMMA) spheres (350–360nm) as inner cores, and ceria nanoparticles (5–10nm) as outer shells were synthesized via electrostatic interaction. Chemical mechanical polishing (CMP) tests for silica films showed that the hybrid particles exhibited lower surface roughness, fewer scratches as well as lower topographical variations than those of solid ceria particles and (PMMA+CeO2) mixed particles. The improved CMP behavior might be attributed to the synergetic effect of the PMMA cores and the ceria shells. Furthermore, we discussed the material removal mechanism of hybrids in CMP process based on the proposal that the core/shell composite abrasives might be considered as micro-fixed abrasive pads.
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