Abstract
Free-standing polymeric optical waveguide films with 45° mirrors and MT connectors (mechanically transferable spacing connectors) were fabricated by spin-coating, photolithography and reactive ion etching. The spin-coated films had sufficient thickness controllability and surface smoothness for them to be used to fabricate multimode waveguides with a low loss of less than 0.02 dB/cm at 0.83 μm using deuterated-polymethylmethacrylate for the core and UV-cured resin for the cladding. For application to optical interconnections, a 45° mirror was formed in the waveguide by using a 90° V-shaped diamond blade, and the mirror loss was 0.3–0.7 dB depending on the measurement conditions. Free-standing polymeric waveguide films were mounted in an MT-compatible connector made of Pyrex glass by using UV curable resin. The insertion loss was about 1 dB which was sufficiently low for practical use.
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