Abstract
In this paper we present a fabrication technique for monolithically integrated polymer-based optical sensors built up with diffractive and refractive optical components by injection moulding. Mould inserts, e.g. a toroidal optical mirror with an average surface roughness of R/sub a/<20 nm and a radial shape accuracy as high as 0.2% (0.1 mm) and optical gratings for the visible (VIS) and near infrared (NIR) spectral range with a planarity of /spl plusmn/4 /spl mu/m/cm and an absolute diffraction efficiency as high as /spl eta/=80%, can be realised by ultra-precision machining and electro-forming. All optical elements have been replicated in polycarbonate (PC) with comparable characteristics.
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