Abstract
In this paper, a novel polymer MOEMS (Micro-Opto-Electro-Mechanical Systems) accelerometer is reported on. Low cost, photopatternable epoxies, EpoClad and EpoCore, are UV exposed by lithography to form this accelerometer in a simple and robust fabrication process. The EpoClad is used for the cladding layer and EpoCore for the waveguides, fiber optic clamps and the seismic mass. The acceleration sensing principle is based on light intensity modulation by the reflection of seismic mass’ position. A laser diode light source and a photodiode, connected to the sensor core through optical fibers, are used to extract the intensity variation as a function of acceleration. A vibration test of this MOEMS accelerometer yields a measured sensitivity of 1.5 mV/g.
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