Abstract
The point-deflection method provides a relatively new approach to in-situ stress measurements for freestanding thin films. By applying a small concentrated transverse force at the center of a prestressed film, and measuring the corresponding out-of-plane displacements at selected locations, the average internal stress can be readily evaluated. The load-deflection relationships, which have been derived for both circular and rectangular shapes, are essentially independent of film material properties, and quite robust with respect to variations in boundary constraints. Finite element simulations have further substantiated the method.
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