Plasmachemical synthesis of coatings using a vacuum arc discharge

Abstract

Summary In this paper we discuss the issues of applying protective coatings on the copper anodes of powerful generator tubes. As a synthesized material due to its high operational properties was chosen titanium carbide obtained by sputtering a titanium cathode in benzene vapors. Scheme of a vacuum arc device used in this work and also the technological processes for the plasmachemical synthesis of coatings on complex shape anodes are described. For a correct choice of the technological parameters it was considered a model of penetration of the plasma flux into the hollow copper anode that was verified by experiments using a setup with a variable cavity diameter. On the emission spectrum of the discharge in the process of coating deposition shown in this work were recorded spectral lines corresponding to the atoms and ions of titanium and carbon ions. We investigated the distribution of elements across the thickness of the formed coating immediately after deposition and after annealing in vacuum, also the X-ray diffraction pattern and a microsection for the obtained titanium carbide coating are presented. As a result of the work it can be noted that the described sequence of technological processes, subject to the control of plasma flux parameters, allows obtaining a high quality protective coating on parts of complex shape.