Abstract
Oxygen plasmas generated by the slot antenna type microwave plasma source are studied using the single Langmuir probe technique. Microwave power in the range from 600 to 1200 W at frequency 2.45 GHz is applied at neutral gas pressure 100 Pa. Axial distributions of floating potential, plasma potential, concentrations of electrons and negative ions and electron energy probability function are obtained. The influence of the electromagnetic field on the plasma parameter distribution is discussed on the basis of analytical formulas and numerical field computation. The experimentally obtained electronegativity α ≃ 2 is compared with the theoretical results from a simple model based on the balance equation for the negative ions.
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