Abstract
A diamond-like carbon (DLC) film, coated on a AISI420-J2 stainless steel substrate and vertically aligned graphite (VAG), was structured by high-density plasma oxidation to work as a DLC-punch for micro-stamping and DLC-nozzle array for micro-dispensing, in addition to acting as a copper-plated thermal spreader, respectively. Thick DLC films were micro-patterned by maskless lithography and directly plasma-etched to remove the unmasked regions. Thick VAG (Ca plates were micro-patterned by screen-printing and selectively etched to activate the surface. Raman spectroscopy as well as electric resistivity measurement proved that there was no degradation of VAG by this surface activation. Wet plating was utilized to prove that copper wettability was improved by this surface treatment.
Highlights
Carbon has various solid morphologies in industrial materials—for example, graphene, diamond, diamond-like carbon (DLC), and carbon nano-tube CNT (Carbon Nano-Tube) in films; and graphite, diamond, and glassy carbon (GC) as a solid substrate
Thick DLC films were coated on the AISI420J2 stainless steel substrates by MF-AC PECVD (Midrange Frequency – Alternative Current Plasma Enhanced Chemical Vapor Deposition) process [9]
A DLC-punch array with the unit size of 3.5 μm × 3.5 μm × 3.1 μm was formed by fine machining of thick DLC films with the slicing width of 1.5 μm
Summary
Carbon has various solid morphologies in industrial materials—for example, graphene, diamond, diamond-like carbon (DLC), and carbon nano-tube CNT (Carbon Nano-Tube) in films; and graphite, diamond, and glassy carbon (GC) as a solid substrate These carbon derivatives have high functionality in properties. Both graphene films and the vertically aligned graphite (VAG) comprising a stack of graphene planes have thermal conductivity higher than 1700 W/K/m [1,2]. They are too brittle to be mechanically machined for shaping into device and mechanical components. GC was machined into a mold with micro-textures for injection molding to transcribe the textures to optical plastics, using picosecond pulse laser micro-texturing [7]
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