Abstract
Plasma density, electron temperature, and plasma potential were measured using a triple Langmuir probe along the axis of a microwave resonant cavity discharge with and without electron current extraction to a keeper electrode and anode. Throughout most of the cavity, electron temperatures were low (1-2 eV), but rose sharply to ~ 10 eV adjacent to an alumina window that separated the plasma from the microwave source. Those hot electrons generated a region of heavily overdense (~ 10 m) plasma that dominated the cavity current extraction capability.
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