Abstract
The reduction process of 72 GeF 4 in hydrogen plasma of RF-discharge (13.56 MHz) was experimentally investigated. It was found that 72 Ge, polyfluorogermanes and gaseous HF were the main products of conversion. The behavior of the main electroactive impurities and of metal impurities in the process of hydrogen reduction of 72 GeF 4 was considered. Based on the data of emission spectroscopy of chemically active plasma, assumptions were made about the main plasma-chemical reactions responsible for the process of hydrogen reduction of 72 GeF 4 . A single crystal of n -type with concentration of charge carriers of 13 cm 3 , ρ = 47 Ω cm was produced using a Czochralski method after the process of zone recrystallization of 72 Ge.
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