Abstract
Abstract The copolymer of vinylidene fluoride (VDF) and trifluoroethylene (TrFE) is an excellent ultrasonic (US) transducer material because of its acoustic impedance (4.5 10 Kg/m2s) close to that of biological tissues and its large electromechanical coupling factor (K1 = 0.32).1 We have explored2 the feasibility of an integrated silicon-piezoelectric copolymer transducer array fabricated by depositing a thin P(VDF-TrFE) layer directly on silicon wafers and by poling the resulting thin copolymer layer by thermal corona discharge.
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