Picometre and nanoradian heterodyne interferometry and its application in dilatometry and surface metrology

Abstract

A high-sensitivity heterodyne interferometer implementing differential wavefront sensing for tilt measurement was developed over the last few years. With this setup, using an aluminium breadboard and compact optical mounts with a beam height of 2 cm, noise levels less than 5 pm Hz−1/2 in translation and less than 10 nrad Hz−1/2 in tilt measurement, both for frequencies above 10−2 Hz, have been demonstrated. Here, a new, compact and ruggedized interferometer setup utilizing a baseplate made of Zerodur, a thermally and mechanically highly stable glass ceramic with a coefficient of thermal expansion (CTE) of 2 × 10−8 K−1, is presented. The optical components are fixed to the baseplate using a specifically developed, easy-to-handle, assembly-integration technology based on a space-qualified two-component epoxy. While developed as a prototype for future applications aboard satellite space missions (such as Laser Interferometer Space Antenna), the interferometer is used in laboratory experiments for dilatometry and surface metrology. A first dilatometer setup with a demonstrated accuracy of 10−7 K−1 in CTE measurement was realized. As it was seen that the accuracy is limited by the dimensional stability of the sample tube support, a new setup was developed utilizing Zerodur as structural material for the sample tube support. In another activity, the interferometer is used for characterization of high-quality mirror surfaces at the picometre level and for high-accuracy two-dimensional surface characterization in a prototype for industrial applications. In this paper, the corresponding designs, their realizations and first measurements of both applications in dilatometry and surface metrology are presented.