Abstract
AbstractMethyl isobutyrate is plasma‐polymerized varying the precursor flow rate (Φp), the working pressure (p) and the radiofrequency power injected in the discharge (PRF). Through the use of an experimental design, PRF reveals to be the key parameter regarding the incorporation of oxygen‐based functionalities in the plasma polymer films (PPFs). Combining the use of X‐ray photoelectron spectroscopy (XPS), time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) and principal component analysis (PCA), our results demonstrate that an increase of PRF (i) lowers the incorporation of the precursor ester groups within the PPFs and (ii) amplifies the PPF crosslinking density (χ). A correlation between the PPF physico‐chemistry and the plasma composition is established using residual gas analysis mass spectrometry. It is shown that an increase of PRF increases both the extent of the precursor fragmentation and the production of non‐reactive oxygen‐based species in the plasma that do not contribute to the PPF growth. Incidentally, in the PRF range studied, the total amount of oxygen‐based functionalities incorporated in the PPFs (at.%O) varies from 23.9 to 10.1 at.%. magnified image
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