Abstract
Laser thermochemical recording is a flexible method for direct writing the binary planar structures (for instance, diffractive optical elements) by a local laser-induced oxidation of thin metal films. Unfortunately, due to excess of influencing parameters, search for regimes of high-resoluted recording could be complicated. The presented article proposes the way to analyze the hard-to-reach regimes of laser recording by modeling them with more convenient regimes (with different geometric and/or thermochemical parameters) based on their physical similarity.
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