Abstract
ARROW-type optical waveguides are designed for implementation on silicon using the materials (silicon dioxide and silicon nitride) and techniques (CVD, RIE) of CMOS integrated-circuit technology. Light is detected by a photodiode buried in the silicon substrate, which is made following the same process. The steps of this process are described and their influence on the optical properties of the guides is analysed. The optical signal attenuation in the waveguide-photodiode coupling region and the cut-off frequency of the system are measured in test devices. The advantages of the technological compatibility with CMOS circuits are discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
